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纳米复合Ti-B-N薄膜的结构和摩擦学性能
中图分类号:

TG174.44

基金项目:

国家“863”高技术项目(2001AA338010);国家自然科学基金(50271053):欧盟第5框架计划项目(GRD2001-40419):中科院兰州化物所固体润滑国家重点项目(200101)


Structure and Tribological Characteristics of Nanocomposite Ti-B-N Coatings
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    摘要:

    研究了射频等离了体辅助化学气相沉积(PCVD)技术获得的Ti-B-N薄膜的组织结构和力学性能。结果发现,B元素的加入使薄膜中出现TiN纳米晶和BN非晶(nc-TiN/a-BN)的复合结构,其硬度显著高于TiN薄膜,最高可达40GPa。用球盘式摩擦磨损实验考察了薄膜的磨损特性。结果表明:与TiN薄膜相比,Ti-B-N薄膜抗磨损性能有显著提高,磨损机制与TiN薄膜不同,摩擦系数较TiN稍高。

    Abstract:

    The structure and properties of Ti-B-N coatings prepared by radio-frequency plasma-enhanced chemical vapor deposition (rf-PCVD) have been investigated in this work. The coatings were characterized by energy dispersive X-ray analysis (EDX), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and optical microscopy. Ball-on-disk tribometer and microscopic hardness tester were employed in evaluating the mechanical properties of the coatings. The results show that the structure of the coatings is a nanocomposite, where nanocrystalline TiN is embedded in the amorphous BN and TiB2 matrix. Compared with TiN coatings, the micro-hardness of Ti-B-N coatings can reach 40 GPa. The wear resistances of Ti-B-N coatings remarkably increase with a certain addition of boron, which caused the change of friction mechanism of TiN coatings, although its friction coefficient is higher than that of TiN.

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马大衍 马胜利 徐可为 刘维民 S.Veprek.纳米复合Ti-B-N薄膜的结构和摩擦学性能[J].稀有金属材料与工程,2005,34(10):1597~1600.[Ma Dayan, Ma Shengli, Xu Kewei, Liu Weimin, S. Veprek. Structure and Tribological Characteristics of Nanocomposite Ti-B-N Coatings[J]. Rare Metal Materials and Engineering,2005,34(10):1597~1600.]
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  • 收稿日期:2004-02-19
  • 最后修改日期:2004-02-19