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磁控溅射气体对ZrCoRE薄膜微观结构和吸氢性能的影响
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兰州空间技术物理研究所 真空技术与物理重点实验室,甘肃 兰州 730000

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甘肃省自然科学基金(23JJRA1355), 2023年兰州市创新项目 (2023-QN-22),,国家自然科学基金项目(面上项目,重点项目,重大项目)62171208


Effect of Magnetron Sputtered Gas on Microstructure and Hydrogen Adsorption Performance of ZrCoRE Films
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Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China

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National Natural Science Foundation of China (62171208); Natural Science Foundation of Gansu Province (23JRRA1355)

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    摘要:

    ZrCoRE(RE为稀土元素)吸气剂薄膜具有气体吸附性能好、活化温度低和无污染等优点,在微机电系统MEMS器件真空封装中具有重要应用。研究了直流磁控溅射气体的种类和压强对薄膜微观结构和吸氢性能的影响。结果表明,采用氩气(Ar)进行磁控溅射,沉积的薄膜较致密,晶界结构较少,随着Ar气压增大,薄膜中晶界和间隙结构增多。采用氪气(Kr)进行磁控溅射,沉积的薄膜中含有较多的晶界和团簇结构,薄膜具有明显的柱状晶结构,柱状结构之间分布着大量的界面和间隙,能为气体扩散提供更多路径。随着Kr气压增大,薄膜的连续柱状结构生长更明显,晶界扩展的更深、更宽,该结构具有更大的比表面积,可提高氢气在薄膜中的吸附速率和吸附量。因此,Ar和Kr气压增大有利于提高薄膜的气体吸附性能。

    Abstract:

    ZrCoRE (RE denotes rare earth elements) non-evaporable getter films have significant applications in vacuum packaging of micro electro mechanical system devices because of their excellent gas adsorption performance, low activation temperature and environmental friendliness. The films were deposited using DC magnetron sputtering with argon and krypton gases under various deposition pressures. The effects of sputtering gas type and pressure on the morphology and hydrogen adsorption performance of ZrCoRE films were investigated. Results show that the films prepared in Ar exhibit a relatively dense structure with fewer grain boundaries. The increase in Ar pressure results in more grain boundaries and gap structures in the films. In contrast, films deposited in Kr display a higher density of grain boundaries and cluster structures, and the films have an obvious columnar crystal structure, with numerous interfaces and gaps distributed between the columnar structures, providing more paths for gas diffusion. As Kr pressure increases, the film demonstrates more pronounced continuous columnar structure growth, accompanied by deeper and wider grain boundaries. This structural configuration provides a larger specific surface area, which significantly improves the hydrogen adsorption speed and capacity. Consequently, high Ar and Kr pressures are beneficial to improve the adsorption performance.

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周超,李得天,马占吉,李刚,何延春,杨拉毛草.磁控溅射气体对ZrCoRE薄膜微观结构和吸氢性能的影响[J].稀有金属材料与工程,2025,54(6):1451~1456.[zhou chao, Detian Li, Zhanji Ma, Gang Li, Yanchun He, Lamaocao Yang. Effect of Magnetron Sputtered Gas on Microstructure and Hydrogen Adsorption Performance of ZrCoRE Films[J]. Rare Metal Materials and Engineering,2025,54(6):1451~1456.]
DOI:10.12442/j. issn.1002-185X.20240265

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  • 收稿日期:2024-05-07
  • 最后修改日期:2025-03-20
  • 录用日期:2024-06-19
  • 在线发布日期: 2025-06-10
  • 出版日期: 2025-06-09