AlN piezoelectric film has a lot of excellent physical chemistry properties.This discussion focus on the str uctural characters,pre-pared methods and applied prospect o f AlN piezoelectric films.
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许小红 武海顺 等. AlN压电薄膜材料研究进展[J].稀有金属材料与工程,2002,(6):456~459.[Xu Xiaohong, Wu Haishun, Zhang Fuqiang, Duan Jingfang, Li Zuoyi . The Research Progress of AlN Piezoelectric Thin Films[J]. Rare Metal Materials and Engineering,2002,(6):456~459.] DOI：[doi]