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硫分压对光吸收层CuInS2薄膜性能的影响
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“十一五”国家高技术研究开发计划 (“863”计划) 资助项目(2006AA03Z237)


Effect of Sulfur Partial Pressure on Properties of CuInS2 Absorber Films
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    摘要:

    在不同硫分压r (r=Sn/[N2+Sn])下,采用Cu-In预制膜硫化法制备了CuInS2薄膜。用扫描电子显微镜、X射线衍射仪、霍尔测试仪、紫外-可见光分光光度计对薄膜的表面形貌、结构、电学、光学性能进行了表征分析。结果表明:随着r增加,薄膜的结晶质量提高,当r=1/2时,晶粒大小如一,粒度保持在1 μm左右,沿[112]晶向择优生长,载流子浓度为5.6×1016 cm-3,光学带隙在1.53 eV左右

    Abstract:

    CuInS2 (CIS) films were prepared by electrodepositing-sulfurization at the different partial pressures of sulfur r(r=Sn/[N2+Sn]). Their surface morphologies, crystalline structure, electrical and optical properties were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), Hall system and ultraviolet-visible (UV-VIS) spectraphotometers, respectively. The results show that the crystalline quality is improved with increasing of r. It is found that the CuInS2 film sulfurized at r=1/2 with the fairly large grain size of about 1 μm has (112) preferred orientation, the carrier concentration is 5.6×1016 cm-3, the optical band gap is about 1.53 eV

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阎有花,刘迎春,方 玲,卢志超,周少雄,李正邦.硫分压对光吸收层CuInS2薄膜性能的影响[J].稀有金属材料与工程,2009,38(5):838~841.[Yan Youhua, Liu Yingchun, Fang Ling, Lu Zhichao, Zhou Shaoxiong, Li Zhengbang. Effect of Sulfur Partial Pressure on Properties of CuInS2 Absorber Films[J]. Rare Metal Materials and Engineering,2009,38(5):838~841.]
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  • 收稿日期:2008-05-25
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