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无氟MOD法制备DyBa2Cu3O7-x膜的高温热处理过程研究
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国家自然科学基金(50672078);国家杰出青年基金(50588201)和国家“973”项目(2007CB616906)


High Temperature Treatment of DyBa2Cu3O7-x Thin Film Prepared by F-Free Metal Organic Deposition Method
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    摘要:

    采用无氟金属有机物沉积法(MOD)在(00l)取向的LaAlO3 单晶基底上制备出DyBa2Cu3O7-x(DyBCO)超导薄膜。由于采用了无氟金属有机物体系,分解过程中避免了采用传统的三氟醋酸盐时有害气体的产生。SEM分析表明,成相过程中增加高温热处理过程,可以明显提高外延生长薄膜的质量。X射线衍射(XRD)分析及φ扫描的结果表明,经过高温处理的DyBCO薄膜具有良好的面内外织构。本研究制备的DyBCO薄膜的超导转变温度达92 K,77 K自场下的临界电流密度达到1.8 MA/cm2

    Abstract:

    Epitaxial DyBa2Cu3O7-x(DyBCO) superconductive thin film was fabricated via a F-free metal organic deposition (MOD) method on the (00l) single crystal substrate of LaAlO3. Because of the fluorine-free metal organic system, harmful gas by the normal TFA-MOD approach was avoided during the heat treatment. A high temperature treatment was introduced during the growth of DyBCO film and then the SEM observation shows denser microstructure and better texture of the film. X-ray diffraction pattern reveals the c-axis oriented grains. φ-scan also shows an excellent in-plane texture in the DyBCO film with a high temperature treatment. The DyBCO film fabricated by F-free MOD with a high temperature treatment has a superconductivity transition temperature of 92 K and a critical current density of 1.8 MA/cm2 at 77 K in self-field

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师晓燕,蒲明华,王文涛,赵 勇.无氟MOD法制备DyBa2Cu3O7-x膜的高温热处理过程研究[J].稀有金属材料与工程,2010,39(4):707~710.[Shi Xiaoyan, Pu Minghua, Wang Wentao, Zhao Yong. High Temperature Treatment of DyBa2Cu3O7-x Thin Film Prepared by F-Free Metal Organic Deposition Method[J]. Rare Metal Materials and Engineering,2010,39(4):707~710.]
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  • 收稿日期:2009-04-23
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