Transparent beryllium hydride (BeH2) films were prepared by the pyrolysis of di-t-butylberyllium etherate (t-Bu2Be·Et2O) under low pressure using metalorganic chemical vapor deposition (MOCVD) apparatus. The films were heated to 300 ℃ for dehydrogenation, and the released H2 was detected by gas chromatography. The XPS analysis shows that the surface layer of BeH2 film is BeO. The IR spectrum indicates that there exists Be-H-Be bend vibration
参考文献
相似文献
引证文献
引用本文
张吉强,罗江山,罗炳池,吴卫东. MOCVD方法制备BeH2薄膜[J].稀有金属材料与工程,2012,41(8):1483~1486.[Zhang Jiqiang, Luo Jiangshan, Luo Bingchi,,Wu Weidong. Preparation of Beryllium Hydride Films by MOCVD[J]. Rare Metal Materials and Engineering,2012,41(8):1483~1486.] DOI：[doi]