+高级检索
溅射气压对铝合金表面HPPMS沉积钒薄膜摩擦学性能的影响
DOI:
作者:
作者单位:

作者简介:

通讯作者:

中图分类号:

基金项目:

国家自然科学基金(51175118); 表面物理与化学国家重点实验室开放基金(SPC201104)


Effects of Sputtering Pressure on Tribological Properties of Vanadium Films on Aluminum Alloy by High Power Pulsed Magnetron Sputtering
Author:
Affiliation:

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    采用高功率脉冲磁控溅射(HPPMS)技术,在铝合金基体上制备V薄膜。研究溅射气压对V薄膜相结构、表面形貌及摩擦学性能的影响。结果表明:不同气压下制备的V薄膜中的V相仅沿(111)晶面生长,其衍射峰强度先增强后减弱,当气压为0.5 Pa时,衍射峰最强且择优取向最明显;同时,V薄膜表面质量最好,其表面粗糙度最小仅为0.267 nm。室温下V薄膜样品的耐磨性能与基体相比有大幅提高,当气压为0.5 Pa时,摩擦系数可由基体的0.57下降到0.28,磨痕表面无明显的剥落迹象,表现出最佳的摩擦磨损性能。经过200和300 ℃加热处理后的V薄膜样品的摩擦系数与基体相比具有稳定的低值,这是由于表面氧化造成的

    Abstract:

    Vanadium films were prepared on the surface of aluminum alloy using a high power pulsed magnetron sputtering (HPPMS) method. The influences of the sputtering pressure on the phase structure, surface morphology and tribological properties of vanadium films have been investigated. Results show that the vanadium phase in the vanadium films only grows along the (111) crystal under different pressures. The diffraction peaks increase with increasing the pressure and decrease if the pressure further increasing. The diffraction peak of V(111) is the strongest and the preferred orientation is the most obvious when the pressure is 0.5 Pa. Meanwhile the vanadium film has the smoothest surface with the surface roughness of only 0.267 nm. The samples demonstrate much lower friction coefficient compared with the substrate at room temperature. The sample treated at 0.5 Pa possesses the best tribological properties with the friction coefficient decreasing from 0.57 to 0.28, and there is no obvious spalling on the worn surface. The friction coefficients of vanadium films annealed at 200 and 300 °C is low and stable compared with the unannealed samples, which is attributed to the surface oxidation

    参考文献
    相似文献
    引证文献
引用本文

李春伟,田修波,刘天伟,秦建伟,巩春志,杨士勤.溅射气压对铝合金表面HPPMS沉积钒薄膜摩擦学性能的影响[J].稀有金属材料与工程,2013,42(5):1017~1022.[Li Chunwei, Tian Xiubo, Liu Tianwei, Qin Jianwei, Gong Chunzhi, Yang Shiqin. Effects of Sputtering Pressure on Tribological Properties of Vanadium Films on Aluminum Alloy by High Power Pulsed Magnetron Sputtering[J]. Rare Metal Materials and Engineering,2013,42(5):1017~1022.]
DOI:[doi]

复制
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2012-05-16
  • 最后修改日期:
  • 录用日期:
  • 在线发布日期:
  • 出版日期: