The effect of substrate surface treatments on structures and sorption properties of ZrCoRE thin film getters were analyzed by SEM, SPI, XRD and dynamic gas sorption tests. The results show that nanostructures of ZrCoRE thin films are strongly affected by the substrate surface. Both surface roughness and structure disorder degree grow with the increase of substrate surface roughness. After activation at 300 oC for 30 min, the sorption property of I-type getter film (Ra=5 nm) decreases quickly with the time. While II-type (Ra=7 nm), III-type (Ra=59 nm) and type-Ⅳ(Ra=125 nm) getter films exhibit stable gas sorption plateaus and increasing sorption speeds in sequence. Ⅳ-type getter film shows the best sorption property