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正反欧姆区间伏安特性对镀层均匀性及膜基结合强度的影响
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西安理工大,西安理工大学,西安理工大学,西安理工大学

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TB43

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国家自然科学基金项目(面上项目,重点项目,重大项目)


The effects of volt-ampere characteristics in positive-ohm and anti-ohm sections on coating uniformity
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Xi'an University of Technology,Xi'an University of Technology,Xi'an University of Technology,Xi'an University of Technology

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    摘要:

    将靶材与真空腔之间的伏安特性引入正-反欧姆过渡区间,采用脉冲控制模式研究不同靶电流密度对镀层均匀性和膜基结合强度的影响规律。实验发现:当靶面放电区电流密度(Id)由0.083A/cm2增加至0.175A/cm2时,靶电压随靶电流密度的增大呈线性增大关系,与之对应的镀层厚度差由7.984μm增大至14.011μm;但当Id由0.175A/cm2增大至0.25A/cm2时,靶电压随靶电流密度的增大呈线性减小关系,与之对应的镀层厚度差则由14.011μm减小至10.077μm;而薄膜厚度减小率由97.38%(Id=0.083A/cm2)降低为89.491%(Id=0.25 A/cm2);另外,在反欧姆区膜基结合强度随Id的增大而快速增大。以上结果表明:反欧姆环境下利于改善镀层的均匀性和提高膜基结合强度。

    Abstract:

    This work was to introduce the voltage characteristics between the target and the vacuum chamber into positive-Ohm and anti-ohm and to study the influence rule on the uniformity of the coating and the membrane-binding intensity caused by the different target current controlled by impulse model. It was found that the target voltage increased with increasing target current density linearly when the target current density(Id) increased from 0.083A/cm2 to 0.175A/cm2. Meanwhile, the difference of coating thickness increased from 7.984μm to 14.011μm. However, the targer volttage decreased linearly with increasing target current density when the target current density increases from 0.175A/cm2 to 0.25A/cm2, and the difference of coating thickness decreased from 14.011μm to 10.077μm. The decreasing rate of film thickness changed from 97.38% (Id=0.083A/cm2) to 89.491% (Id=0.25 A/cm2). In addition, the film adhesion intensity rapidly increased with increasing target current density in the anti-ohm section. The above results show that the anti-ohm environment is conducive to improving the uniformity of the coating and the film adhesion intensity.

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冯林,蒋百灵,杨超,郝娟.正反欧姆区间伏安特性对镀层均匀性及膜基结合强度的影响[J].稀有金属材料与工程,2016,45(9):2458~2461.[Feng lin, Jiang Bai Ling, Yang chao, Hao juan. The effects of volt-ampere characteristics in positive-ohm and anti-ohm sections on coating uniformity[J]. Rare Metal Materials and Engineering,2016,45(9):2458~2461.]
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  • 收稿日期:2014-07-21
  • 最后修改日期:2014-10-15
  • 录用日期:2014-11-20
  • 在线发布日期: 2016-10-09
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