The synthesis conditions of pure phase LiFePO4 target have been studied. The synthesis process was analyzed by TG-DTA, the crystal phase was examined by XRD and the surface morphology was observed by SEM. The results indicate that the pure phase of LiFePO4 sample is obtained in solution route by calcining at 1073 K under Ar (93%) and H2 (7%) mixture gas flow, and then it is made as the target with high crystallinity and large grains. LiFePO4 film can be prepared by pulsed laser deposition. The film shows a dense structure, and the grain size is achieved at the nanometer level