Two types of thin films were deposited by the magnetron sputtering method. After annealing at 650 ℃, the samples were tested and analyzed by XRD and VSM respectively. The Mo/Nd/NdFeB/Nd/Mo multilayer thin films with the thickness ratio of NdFeB/Nd=6/5 show high coercivity. The parallel and perpendicular coercivity of multilayer films were 14.5kOe and 10.5kOe respectively. The Mo/[NdFeB/Nd]n/Mo (n=2,5,8,10,NdFeB/Nd=6/5) alternative multilayer thin films with n=8 show good hard magnetic properties .The parallel and perpendicular coercivity of alternative multilayer thin films were 21.3kOe and 16.7kOe respectively. The magnetic properties of the alternative multilayer film with thickness ratio of NdFeB/Nd=6/5 was enhanced in comparison with multilayer film.