Ultra-fine grained commercial purity titanium (UFG CP Ti) was fabricated by combined refining process (Equal channel angular pressing (ECAP), cold rolling and rotary swaging) at room temperature. The grain average size of UFG CP Ti was about 180 nm, and ultimate tensile strength of UFG CP Ti was over 870 MPa. The nanoindention creep tests of UFG CP Ti were carried out by the nanoindenter with the constant loading rate/load at room temperature. The creep strain rate sensitivity m was determined by using depth and micro-hardness during the holding load stage. The results show that due to the obvious grain refinement, increase of the amount and the length of grain boundaries and the dislocation multiplication, UFG CP Ti shows good resistance to creep at room temperature and its major creep mechanism is the dislocation creep. The values of indentation creep rate sensivities are independent of loading conditions, but are close related to the microstructure of the materials.