侯静,杨培志,郑勤红,李赛,杨德威.原子层沉积制备二氧化钛薄膜及其光催化性能研究[J].稀有金属材料与工程,2021,50(4):1371~1377.[Hou Jing,Yang Peizhi,Zheng Qinhong,Li Sai,Yang Dewei.Preparation of Titanium Dioxide Thin Films by Atomic Layer Deposition and Its Photocatalytic Activity[J].Rare Metal Materials and Engineering,2021,50(4):1371~1377.]
原子层沉积制备二氧化钛薄膜及其光催化性能研究
投稿时间:2020-05-27  修订日期:2020-07-10
中文关键词:  原子层沉积  二氧化钛  薄膜  光催化
基金项目:国家自然科学基金资助(U1802257)、云南省基础研究重点项目(2017FA024)、云南省高校科技创新团队支持计划
中文摘要:
      采用原子层沉积方法在K9玻璃上制备出TiO2薄膜,利用XRD、SEM、AFM、分光光度计和紫外-可见光谱仪表征了不同沉积温度下薄膜的物相结构、光学性能和光催化性能。结果表明:25℃和120℃下制备的TiO2薄膜为无定形态结构,210℃和300℃下可获得锐钛矿结构;随着沉积温度的升高,薄膜的晶粒尺寸变大,表面粗糙度增加,透射率降低,光催化性能增强;300℃下制备的TiO2薄膜(2mm*2mm)经过12h的紫外可见光照射,甲基橙溶液的降解率可达47.16%,通过增加样品表面积可明显提高对甲基橙溶液的降解率。
Preparation of Titanium Dioxide Thin Films by Atomic Layer Deposition and Its Photocatalytic Activity
英文关键词:Atomic layer deposition  titanium dioxide  thin film  photocatalysis
英文摘要:
      :TiO2 thin films were prepared by Atomic layer deposition on K9 glass. The crystal structure, optical properties and photocatalytic properties of the films at different deposition temperatures were characterized by XRD, SEM, AFM, spectrophotometer and ultraviolet-visible spectrometer. TiO2 thin films were amorphous at 25℃ and 120 ℃, anatase structure was obtained at 210 ℃ and 300 ℃. As the deposition temperature increases, the size of the film shrinks, the surface size decreases, the film becomes denser, and the lower the transmittance, the better the photocatalytic performance. The degradation rate of methyl orange solution can reach 47.16% under 12h visible light irradiation of TiO2 film (2mm * 2mm) prepared at 300 ℃. Increasing the sample surface ares in a tiling manner can significantly increase the degradation of methyl orange solution rate.
作者单位E-mail
侯静 云南师范大学 houjing1108@163.com 
杨培志 云南师范大学  
郑勤红 云南师范大学  
李赛 云南师范大学  
杨德威 云南师范大学  
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