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化学气相沉积法制备铼材料的研究进展
作者:
作者单位:

昆明贵金属研究所 稀贵金属综合利用新技术国家重点实验室

基金项目:

云南省创新引导与科技型企业培育计划(202104AR040017)；云南省基础研究计划优秀青年项目(2019FI020)；云南省科技厅基础研究计划重点项目(202001AS070048)


Research Progress of Rhenium prepared by chemical vapor deposition
Author:
Affiliation:

Kunming Institute of Precious Metals,State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals

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    摘要:

    铼具有优异的物理力学性能,作为功能材料及超高温结构材料获得广泛应用。铼材料的制备方法有多种,化学气相沉积(CVD)是其主要的制备技术方法之一。本文简要介绍了化学气相沉积制备铼材料的反应类型、沉积条件及沉积效果,综述了CVD Re材料的沉积动力学、组织结构特征、力学性能的研究现状和典型应用,并与粉末冶金铼进行了对比分析。最后指出了目前CVD Re材料研究亟待解决的关键问题,并对进一步研究的方向和推广应用前景进行了展望。

    Abstract:

    Rhenium is widely used as functional materials and ultra high temperature structural materials due to its excellent physical and mechanical properties. A variety of methods has been applied to prepare rhenium materials, in which chemical vapor deposition (CVD) is one of the main technique. The reaction type, deposition condition and effect of rhenium by CVD are briefly introduced firstly in the present paper. Then, the deposition dynamics, microstructure characteristics, mechanical properties and typical applications of CVD rhenium are reviewed, and compared with powder metallurgy rhenium. Finally, several key issues which need to be solved hereafter are put forward, and the directions of further research and applications foreground is prospected.

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胡昌义,胡晋铨,魏燕,王献,蔡宏中,陈力,张贵学,高勤琴.化学气相沉积法制备铼材料的研究进展[J].稀有金属材料与工程,2023,52(6):2287~2295.[Hu Changyi, Hu Junquan, Wei Yan, Wang Xian, Cai Hongzhong, Zhang Guixue, Chen Li, Gao Qinqin. Research Progress of Rhenium prepared by chemical vapor deposition[J]. Rare Metal Materials and Engineering,2023,52(6):2287~2295.]
DOI：10.12442/j. issn.1002-185X.20220410

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  • 收稿日期:2022-05-10
  • 最后修改日期:2022-06-23
  • 录用日期:2022-07-12
  • 在线发布日期: 2023-07-07
  • 出版日期: 2023-06-30

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