Effects of Substrate Temperatures on the Quality and Optical Properties of ZnO Thin Films Grown on Silicon (111) by P LD

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Effects of Substrate Temperatures on the Quality and Optical Properties of ZnO Thin Films Grown on Silicon (111) by P LD
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                        Zhuang Huizhao,He Jianting,Xue Chengshan,Zhang Xiaokai,Tian Deheng,Hu Lijun,Xue ShoubinZhuang Huizhao,He Jianting,Xue Chengshan,Zhang Xiaokai,Tian Deheng,Hu Lijun,Xue Shoubin

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Key words:PLD; ZnO; thin film; hexagonal wurtzite structure

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[1]Zhuang Huizhao,He Jianting,Xue Chengshan,Zhang Xiaokai,Tian Deheng,Hu Lijun,Xue Shoubin.Effects of Substrate Temperatures on the Quality and Optical Properties of ZnO Thin Films Grown on Silicon (111) by P LD[J].Rare Metal Materials and Engineering,2006,35(7):1105-1108.

[2]SUN Bai,ZOU Chong-Wen,LIU Zhong-Liang,XU Peng-Shou,ZHANG Guo-Bin.Influence of Substrate Temperature on the Structure and Optical Properties of ZnO Thin Films Grown by Pulsed Laser Deposition[J].Journal of Inorganic Materials,2006,21(4):1005-1010.

[3]Rui Ding),Chunxiang Xu),Baoxiang Gu),Zengliang Shi),Haitao Wang),Long Ba) , Zhongdang Xiao) ) Advanced Photonics Center,School of Electronic Science , Engineering,Southeast University,Nanjing ,China ) State Key Laboratory of Bioelectronics,China.Effects of Mg Incorporation on Microstructure and Optical Properties of ZnO Thin Films Prepared by Sol-gel Method[J].Journal of Materials Science & Technology,2010,26(7):601-604.

[4]赖冬寅,李烨,司马立强,王雷.Influence of Substrate Temperature on the Properties of ZnO Thin Films Grown by Pulsed Laser Deposition[J].Foundry Technology,2014(7):1468-1470.

[5]ZHANG Shiyu,LI Qingshan,ZHANG Lichun,LI Ping,MA Zixia,ZHANG Zhifeng.The Structural and Optical Properties of ZnO Thin Films by L-MBE[J].New Technology & New Process,2010(12):79-83.

[6]A. Hojabri,Z. Kavyani,M. Ghoranneviss.Effect of Substrate Temperatures on Structural and Morphological Properties of Nano-Crystalline Silver Thin Films Grown on Silicon Substrates[J].Journal of Inorganic and Organometallic Polymers and Materials,2017,27(1):53-60.

[7]WEI Wei,YANG Rui-xia,WANG Ru,Mu Cun.Influence of Substrate Temperature on Structure and Optical Properties of ZnO Thin Films[J].Journal of Hebei University of Technology,2009,38(6).

[8]He Jianting,Zhuang Huizhao,Xue Chengshan,Tian Deheng,Wu Yuxin,Xue Shoubin,Hu Lijun.Optical and Micro-Structural Properties of ZnO Thin Films Grown on Silicon Substrate by Pulsed Laser Deposition[J].Journal of Rare Earths,2006,24(Z1).

[9]SONG Yong-liang,JI Zhen-guo,WANG Quan-xiang,XIANG Yin,YE Zhi-zhen.Structural and Optical Properties of ZnO Thin Films Prepared by Sol-gel Technique[J].Journal of Materials Science and Engineering,2004,22(1):9-11.

[10]钱峰,刘泉水,韩先虎,钟传杰.Effects of Hydrothermal Treatment on Microstructure and Optical Properties of ZnO Thin Films[J].Journal of Materials Science and Engineering,2015(4):570-575.

[11]FU Changfeng,HAN Lianfu,LIU Chao,CHEN Ximing.Studies on Structure and Optical Properties of Cr-doped ZnO Thin Films[J].Materials Review,2010,24(22).

[12]JIA Xiang-hua,HUANG Hai-liang,FU Si-nian,ZHU Rui-hua,ZUO Gui-hong,CAO Hong-zhong,LI Yue-ying.Effect of Substrate Temperature on Crystalline Characteristics and Optical Properties of ZnO Thin Films[J].Journal of Harbin University of Science and Technology,2014(1):108-111.

[13]ZHANG Yuan-tao,YANG Xiao-tian,ZHAO Bai-jun,LIU Bo-yang,YANG Tian-peng,LI Wan-cheng,LIU Da-li,YANG Shu-ren,DU Guo-tong State Key Laboratory on Integrated Optoelectronics,Jilin University,Changchun ,CHN.Influence of Annealing on ZnO Thin Films Grown on Silicon Substrate by MOCVD[J].Semiconductor Optoelectronics,2004,25(2):151-154.

[14]HE Jian-ting,ZHUANG Hui-zhao,XUE Cheng-shan,WANG Shu-yun.Characteristics of Zinc Oxide Thin Films on Silicon(111) by Pulsed Laser Deposition[J].Electronic Components & Materials,2005,24(5):24-26.

[15]LI Shao-lan,zhanglichun,zhang zhongjun and huang ruizhi.Structural and Photoluminescence Properties of ZnO Films Grown by Pulsed Laser Deposition Technique[J].Infrared,2012,33(6):12-16.

[16]HAO Jiang-bo,XIA Dong-lin,JIANG Hong,ZHAO Xiu-jian.Research on Preparation and Optical Properties of Amorphous Silicon Thin Films by PECVD[J].Journal of Wuhan University of Technology,2007,29(12):55-58.

[17]Wang Yunfei.Influence of Atomic Oxygen Treatment on Microstructures and Optical Properties of ZnO Films[J].JOurnal of Vacuum Science and Technology,2009,29(Z1).

[18]FAN Xi-mei,ZHOU Zuo-wan,LIAN Jian-she.Violet Emission Properties of ZnO Thin Films by Annealing Metal Zn Films[J].Journal of Materials Science and Engineering,2006,24(4):543-546.

[19]Meicheng LI,Liancheng ZHAO,Wei CAI,Dage LIU.AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition[J].Journal of Materials Science & Technology,2002,18(1):24-26.

[20]Guo Maotian,Tian Zhenfeng,Chen Xingke.The Structure and PL Spectrum of ZnO Thin Film on Different Substrate Temperatures[J].Applied Laser,2006,26(1):26-28.

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[Zhuang Huizhao, He Jianting, Xue Chengshan, Zhang Xiaokai, Tian Deheng, Hu Lijun, Xue Shoubin. Effects of Substrate Temperatures on the Quality and Optical Properties of ZnO Thin Films Grown on Silicon (111) by P LD[J]. Rare Metal Materials and Engineering,2006,35(7):1105~1108.]
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Received:May 17,2005
Revised:September 28,2005
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