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Experiments and Their Analysis for Self-Assembly Growth of GaN Quantum Dots via MOCVD
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TN304.23

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    Abstract:

    In recent years, growth of GaN-based materials-related quantum dots has become a hot topic in semiconductor materials research. Considerable efforts have been devoted to growth of self-assembled quantum dots of GaN-based materials via MOCVD (Metal Organic Chemical Vapor Deposition) and there are a lot of relevant literatures. There is, however, few review papers for the topic. In this paper, different experimental methods for fabrication of quantum dots of GaN-based materials via MOCVD are critically reviewed and the experimental conditions and parameters, which may affect growth of the quantum dots, are analyzed, with an aim at providing some critical reference for the related future experiment research.

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[Meng Tao, Zhu Xianfang, Wang Zhanguo. Experiments and Their Analysis for Self-Assembly Growth of GaN Quantum Dots via MOCVD[J]. Rare Metal Materials and Engineering,2005,34(12):1849~1853.]
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  • Received:July 19,2004
  • Revised:September 15,2005
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