The microstructure homogenizations of AgSnO2, AgCuO and AgY2O3 electric contact materials prepared by reactive synthesis process and severe plastic deformation process were investigated. The result showed that the microstructures of the three electric contact materials were different under the same process conditions. The main reason of the above mentioned results is attributed to different diffusion mechanisms which are caused by different element natures in the alloy system. The microstructures of the three electric contact materials can be homogenized by severe plastic deformation, Fore the different electric contact material systems, different plastic deformation degrees are required.