TiAlBN多元膜的性能与组织结构研究
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TG174.444 TG146.23

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Study of Performances and Microstructure of TiAlBN Films
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    摘要:

    采用电弧离子镀技术、TA5钛合金靶沉积TiAlBN薄膜,研究了这种多元膜的显微硬度、高温氧化性能和组织结构,结果表明:这种多元膜具有优于TiN膜的显微硬度;不同于TiN膜的显微组织,其最显著的特征是存在一些细小的钛滴;双靶工作状态下,这些钛滴与膜之间的融合效果较好,膜层表面孔隙较少;薄膜具有TiN的面心立方结构,与TiN膜相比,具有更加明显的择优取向趋势。

    Abstract:

    TiAlBN films have been deposited by cathode arc ion-plating with TA5 titanium alloy target. The performance and microstructure have been studied. The results show that the microhardness of the multi-component films is higher than that of TiN films. The films have better high temperature oxidation performance than that of TiN films. The microstructure of the multi-component films is quite different from TiN films. The microstructure of the multi-component films is characteristic of some small titanium droplets. The titanium droplets are combined with the films substrate and there are a few pores in the films surface in the condition of double targets. It is found that the preferred orientation exists in the films.

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. TiAlBN多元膜的性能与组织结构研究[J].钛工业进展,2004,21(3):24-29.

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  • 最后修改日期:2003-08-11
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